The following parameters come from company product literature and support selection and technical discussions. Deliverable dimensions and specifications are governed by the agreed technical specification.
Material type
Monocrystalline silicon
Principal sizes
450–600 mm (specific sizes subject to technical agreement)
Purity
>8N
Conductivity type
P-type (boron) / N-type (phosphorus)
Resistivity
<0.02、1–4、60–90 Ω·cm
Dimensional tolerance
Within ±0.05 mm
Flatness
≤15 μm; high grade ≤8 μm
Surface roughness
Standard Ra≤0.4 μm; polished Ra≤0.1 μm
Delivery forms
Silicon ingots / cylinders / rings
Downloads
Silicon Materials for Semiconductor Etching — Product Guide