Monocrystalline Silicon Ingots
Solid, initially machined material for subsequent sizing, cutting and precision machining.
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Monocrystalline Silicon Cylinders
Cored and formed cylindrical material provides blanks for silicon ring etch components.
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Monocrystalline Silicon Rings
Materials and blanks for silicon rings in etch equipment, with dimensions and machining defined by drawings.
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Monocrystalline Silicon Rods
Confirm material and machining plans against drawings and technical requirements.
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Silicon Fins
Confirm material and machining plans against drawings and technical requirements.
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Showerheads
Confirm material and machining plans against drawings and technical requirements.
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Silicon Electrodes
Confirm material and machining plans against drawings and technical requirements.
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Silicon Boats
Confirm material and machining plans against drawings and technical requirements.
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Silicon Liners
Confirm material and machining plans against drawings and technical requirements.
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Monocrystalline Silicon Materials
Silicon ingots, cylinders, rings and rods
Silicon Components
Geometry and machining defined by application requirements
New product images are illustrations. Actual geometry and specifications are subject to approved drawings.
Material Specifications
Monocrystalline Silicon Ingots
Monocrystalline Silicon Cylinders
Monocrystalline Silicon Rings
Material type
Monocrystalline silicon
Monocrystalline silicon
Monocrystalline silicon
Principal sizes
450–600 mm (specific sizes subject to technical agreement)
450–600 mm (specific sizes subject to technical agreement)
450–600 mm (specific sizes subject to technical agreement)
Purity
>8N
>8N
>8N
Conductivity type
P-type (boron) / N-type (phosphorus)
P-type (boron) / N-type (phosphorus)
P-type (boron) / N-type (phosphorus)
Resistivity
<0.02、1–4、60–90 Ω·cm
<0.02、1–4、60–90 Ω·cm
<0.02、1–4、60–90 Ω·cm
Dimensional tolerance
Within ±0.05 mm
Within ±0.05 mm
Within ±0.05 mm
Flatness
≤15 μm; high grade ≤8 μm
≤15 μm; high grade ≤8 μm
≤15 μm; high grade ≤8 μm
Surface roughness
Standard Ra≤0.4 μm; polished Ra≤0.1 μm
Standard Ra≤0.4 μm; polished Ra≤0.1 μm
Standard Ra≤0.4 μm; polished Ra≤0.1 μm
Product specifications, inspection methods and delivery condition are governed by mutually approved technical agreements and drawings.